图1 片上铌酸锂薄膜单模波导制备工艺
图2 (a)波导电镜图,(b)-(e)不同偏振模场分布的实验与仿真结果,模场尺寸约为2.5μm
图3 片上铌酸锂MZ调制器芯片设计与成品图
图4 电场分布仿真与电光调控实验结果,半波电压:6.7 V,测得波导损耗0.042 dB/cm
相关文章:
Jintian Lin, Junxia Zhou, Rongbo Wu, Min Wang, Zhiwei Fang, Wei Chu, Jianhao Zhang, Lingling Qiao, and Ya Cheng, "High-Precision Propagation-Loss Measurement of Single-Mode Optical Waveguides on Lithium Niobate on Insulator," Micromachines-Basel 10, 612 (2019).(全文下载:Jintian Lin micromachines-10-00612.pdf)