利用铌酸锂薄膜(LNOI)马赫-曾德调制器实现超低传输损耗探测

作者:发布时间:2019-07-24

图1 片上铌酸锂薄膜单模波导制备工艺


图2 (a)波导电镜图,(b)-(e)不同偏振模场分布的实验与仿真结果,模场尺寸约为2.5μm



图3 片上铌酸锂MZ调制器芯片设计与成品图



图4 电场分布仿真与电光调控实验结果,半波电压:6.7 V,测得波导损耗0.042  dB/cm


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 Jintian Lin, Junxia Zhou, Rongbo Wu, Min Wang, Zhiwei Fang, Wei Chu, Jianhao Zhang, Lingling Qiao, and Ya Cheng, "High-Precision Propagation-Loss Measurement of Single-Mode Optical Waveguides on Lithium Niobate on Insulator," Micromachines-Basel 10, 612 (2019).(全文下载:Jintian Lin  micromachines-10-00612.pdf